Semiconductor Equipment and Materials International
From Engineering Wiki
SEMI Standards
American Institute of Chemical Engineers (SEMI). SEMI is a resource for standards regarding semiconductor manufacturing. The Ohio University Library does not collect SEMI Standards but you can look at their web-page to see what standards they have available. Here is a specific example of acquiring a Standard that the library does not own.
The library does own a few publications produced by SEMI; here is a full listing of what is available in our catalog.
